Stark broadening experiments on a vacuum arc discharge in tin vapor.
نویسندگان
چکیده
Pinched discharge plasmas in tin vapor are candidates for application in future semiconductor lithography tools. This paper presents time-resolved measurements of Stark broadened linewidths in a pulsed tin discharge. Stark broadening parameters have been determined for four lines of the Sn III spectrum in the range from 522 to 538 nm, based on a cross-calibration to a Sn II line with a previously known Stark width. The influence of the electron temperature on the Stark widths is discussed. Results for the electron densities in the discharge are presented and compared to Thomson scattering results.
منابع مشابه
Collective Thomson scattering experiments on a tin vapor discharge in the prepinch phase.
Partially collective Thomson scattering measurements have been performed on a triggered vacuum arc in tin vapor, which is a candidate source of extreme ultraviolet light for application in semiconductor lithography. In this paper, results on the electron densities and temperatures are presented for the prepinch phase of the discharge. Electron densities and temperatures increase from 1 x 10(23)...
متن کاملCharacterization of a vacuum-arc discharge in tin vapor using time-resolved plasma imaging and extreme ultraviolet spectrometry.
Discharge sources in tin vapor have recently been receiving increased attention as candidate extreme ultraviolet (EUV) light sources for application in semiconductor lithography, because of their favorable spectrum near 13.5 nm. In the ASML EUV laboratory, time-resolved pinhole imaging in the EUV and two-dimensional imaging in visible light have been applied for qualitative characterization of ...
متن کاملComparison of Properties of Ti/TiN/TiCN/TiAlN Film Deposited by Cathodic Arc Physical Vapor and Plasma-assisted Chemical Vapor Deposition on Custom 450 Steel Substrates
This study investigated the effects of deposition techniques on the microstructural and tribological properties of Ti/TiN/TiCN/TiAlN multilayer coatings onto a Custom 450 steel substrate. The coatings were produced using cathodic arc physical vapor deposition (CAPVD) and plasma-assisted chemical vapor deposition (PACVD). The microstructural of the coatings was evaluated using (SEM), and phase f...
متن کاملCorrosion Behavior of Ti/TiN Multilayer Nanostructured Coatings Applied on AISI 316L by Arc-PVD Method in the Simulated Body Fluid
In this investigation, Ti/TiN nanolayer and TiN single layer coatings were coated on substrate of AISI 316L stainless steel by applying physical vapor deposition (PVD) using the type of cathodic arc evaporation (CAE). The evaluation of microstructure were carried out using x-ray diffraction (XRD), nanoindentation, atomic force microscopy (AFM) as well as scanning electron microscopy (SEM). Pola...
متن کامل"tin Coatings for Wear Resistance and Gold-like Decorative Coatings"
Titanium Nitride (TiN) coatings have led the way for providing increased wear resistance and extended life of cutting tools, whether carbide inserts or high-speed steel. Where the earliest applications were for high temperature substrate materials (carbides) and chemical vapor deposition (CVD) was the process of choice, later developments in the physical vapor deposition (PVD) technology, espec...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید
ثبت ناماگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید
ورودعنوان ژورنال:
- Physical review. E, Statistical, nonlinear, and soft matter physics
دوره 70 6 Pt 2 شماره
صفحات -
تاریخ انتشار 2004